A standard used for probe-tip diameter evaluation in surface roughness measurements using metrological atomic force microscope

I Misumi, R Kizu, K Sugawara, A Hirai… - Measurement Science …, 2020 - iopscience.iop.org
Recently metrological atomic force microscopes (metrological AFMs) have been used for
surface roughness measurements. The National Metrology Institute of Japan (NMIJ), AIST …

A standard used for probe-tip diameter evaluation in surface roughness measurements using metrological atomic force microscope

I Misumi, R Kizu, K Sugawara… - Measurement …, 2020 - ui.adsabs.harvard.edu
Recently metrological atomic force microscopes (metrological AFMs) have been used for
surface roughness measurements. The National Metrology Institute of Japan (NMIJ), AIST …

A standard used for probe-tip diameter evaluation in surface roughness measurements using metrological atomic force microscope

I Misumi, R Kizu, K Sugawara, A Hirai… - … Science and Technology, 2020 - inis.iaea.org
[en] Recently metrological atomic force microscopes (metrological AFMs) have been used
for surface roughness measurements. The National Metrology Institute of Japan (NMIJ) …