Inline multilayer thickness sensing by using terahertz time-domain spectroscopy in reflection geometry

S Krimi, J Klier, M Herrmann… - … Waves (IRMMW-THz …, 2013 - ieeexplore.ieee.org
We present a novel approach to determine the individual layer thickness in a dielectric
multilayer sample using pulsed terahertz spectroscopy in reflection geometry. In a first step …
被引用次数：27 相关文章

Inline multilayer thickness sensing by using terahertz time-domain spectroscopy in reflection geometry

S Krimi, J Klier, M Herrmann, J Jonuscheit… - 2013 38th International … - infona.pl
We present a novel approach to determine the individual layer thickness in a dielectric
multilayer sample using pulsed terahertz spectroscopy in reflection geometry. In a first step …

Inline multilayer thickness sensing by using terahertz time-domain spectroscopy in reflection geometry

S Krimi, J Klier, M Herrmann, J Jonuscheit, R Beigang - 2013 - publica.fraunhofer.de
We present a novel approach to determine the individual layer thickness in a dielectric
multilayer sample using pulsed terahertz spectroscopy in reflection geometry. In a first step …