Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

E Forsen, G Abadal, J Teva, J Verd, R Sandberg… - Applied Physics …, 2005 - pubs.aip.org
Nanomechanical resonators have been monolithically integrated on preprocessed
complementary metal-oxide-semiconductor (CMOS) chips. Fabricated resonator systems …
被引用次数：152 相关文章

Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

E Forsen, G Abadal, S Ghatnekar-Nilsson, J Teva… - Applied Physics …, 2005 - cir.nii.ac.jp
抄録< jats: p> Nanomechanical resonators have been monolithically integrated on
preprocessed complementary metal-oxide-semiconductor (CMOS) chips. Fabricated …

Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

E Forsen, G Abadal, S Ghatnekar-Nilsson… - Applied Physics …, 2005 - lup.lub.lu.se
Nanomechanical resonators have been monolithically integrated on preprocessed
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Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

E Forsen, G Abadal Berini, S Ghatnekar-Nilsson… - Applied physics …, 2005 - ddd.uab.cat
Nanomechanical resonators have been monolithically integrated on preprocessed
complementary metal-oxide-semiconductor (CMOS) chips. Fabricatedresonatorsystems …

Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

E Forsen, G Abadal… - Applied Physics …, 2005 - ui.adsabs.harvard.edu
Nanomechanical resonators have been monolithically integrated on preprocessed
complementary metal-oxide-semiconductor (CMOS) chips. Fabricated resonator systems …

Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

E Forsen, G Abadal, S Ghatnekar-Nilsson… - Applied Physics …, 2005 - inis.iaea.org
[en] Nanomechanical resonators have been monolithically integrated on preprocessed
complementary metal-oxide-semiconductor (CMOS) chips. Fabricated resonator systems …
[PDF] archive.org

[PDF][PDF] Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

E Forsen, G Abadal, S Ghatnekar-Nilsson, J Teva… - Physics Letters - scholar.archive.org
Nanomechanical resonators have been monolithically integrated on preprocessed
complementary metal-oxide-semiconductor CMOS chips. Fabricated resonator systems …

Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

ES Forsén, G Abadal, S Ghatnekar-Nilsson… - Applied Physics …, 2005 - orbit.dtu.dk
Nanomechanical resonators have been monolithically integrated on preprocessed
complementary metal-oxide-semiconductor (CMOS) chips. Fabricated resonator systems …
[PDF] core.ac.uk

[PDF][PDF] Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

E Forsen, G Abadal, S Ghatnekar-Nilsson, J Teva… - Applied Physics …, 2005 - core.ac.uk
Nanomechanical resonators have been monolithically integrated on preprocessed
complementary metal-oxide-semiconductor CMOS chips. Fabricated resonator systems …
[PDF] academia.edu

[PDF][PDF] Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

E Forsen, G Abadal, S Ghatnekar-Nilsson… - APPLIED PHYSICS …, 2005 - academia.edu
Nanomechanical resonators have been monolithically integrated on preprocessed
complementary metal-oxide-semiconductor CMOS chips. Fabricated resonator systems …