Fabrication and characterization of nanoresonating devices for mass detection

G Abadal - Journal of Vacuum Science & Technology B …, 2000 - pubs.aip.org
We report on a novel fabrication process and preliminary characterization of a
nanomechanical resonating device, which is to be used for mass detection. The fabrication …
被引用次数：184 相关文章

Fabrication and characterization of nanoresonating devices for mass detection

ZJ Davis, G Abadal, O Kuhn, O Hansen… - Journal of Vacuum …, 2000 - portalrecerca.uab.cat
A simple and flexible method for the fabrication of nanomechanical resonators is described.
Direct laser writing on Al coated layered substrates yields a highly flexible mask definition …

[引用][C] Fabrication and characterization of nano-resonating devices for mass detection

Z Davis, G Abadal, O Kuhn, O Hansen, F Grey… - Journal of Vacuum …, 2000 - orbit.dtu.dk
Fabrication and characterization of nano-resonating devices for mass detection — Welcome
to DTU Research Database Skip to main navigation Skip to search Skip to main content …

Fabrication and characterization of nanoresonating devices for mass detection

ZJ Davis, G Abadal, O Kuhn, O Hansen… - Journal of Vacuum …, 2000 - pubs.aip.org
We report on a novel fabrication process and preliminary characterization of a
nanomechanical resonating device, which is to be used for mass detection. The fabrication …

[引用][C] Fabrication and characterization of nanoresonating devices for mass detection

ZJ Davis, G Abadal, O Kuhn… - Journal of Vacuum …, 2000 - ui.adsabs.harvard.edu
Fabrication and characterization of nanoresonating devices for mass detection - NASA/ADS
Now on home page ads icon ads Enable full ADS view NASA/ADS Fabrication and …

[引用][C] Fabrication and characterization of nanoresonating devices for mass detection

ZJ Davis, G Abadal, O Kuhn, O Hansen, F Grey… - Journal of Vacuum …, 2000 - cir.nii.ac.jp
Fabrication and characterization of nanoresonating devices for mass detection | CiNii Research
CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ] 詳細へ移動 検索フォームへ移動 論文・データを …