AFM probes fabricated with masked–maskless combined anisotropic etching and p+ surface doping

J Han, X Li, H Bao, G Zuo, Y Wang… - Journal of …, 2005 - iopscience.iop.org
The paper presents a newly developed high-yield micro-fabrication technology for single-
crystalline silicon atomic force microscope (AFM) probes. Both the tips and the cantilevers …
被引用次数：25 相关文章

[引用][C] AFM probes fabricated with masked–maskless combined anisotropic etching and p+surface doping

J Han, X Li, H Bao, G Zuo, Y Wang, F Feng… - … of Micromechanics and …, 2005 - cir.nii.ac.jp
AFM probes fabricated with masked–maskless combined anisotropic etching and p<sup>+</sup>surface
doping | CiNii Research CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ] 詳細へ移動 検索 …

AFM probes fabricated with masked maskless combined anisotropic etching and p+ surface doping

J Han, X Li, H Bao, G Zuo, Y Wang… - Journal of …, 2006 - ui.adsabs.harvard.edu
The paper presents a newly developed high-yield micro-fabrication technology for single-
crystalline silicon atomic force microscope (AFM) probes. Both the tips and the cantilevers …

[引用][C] AFM probes fabricated with masked-maskless combined anisotropic etching and p+ surface doping

J HAN, X LI, H BAO, G ZUO, Y WANG… - Journal of …, 2006 - pascal-francis.inist.fr
AFM probes fabricated with masked-maskless combined anisotropic etching and p+ surface
doping CNRS Inist Pascal-Francis CNRS Pascal and Francis Bibliographic Databases …
[PDF] researchgate.net

[PDF][PDF] AFM probes fabricated with masked–maskless combined anisotropic etching and p surface doping

J Han, X Li, H Bao, G Zuo, Y Wang, F Feng… - J. Micromech …, 2006 - researchgate.net
The paper presents a newly developed high-yield micro-fabrication technology for single-
crystalline silicon atomic force microscope (AFM) probes. Both the tips and the cantilevers …
[PDF] archive.org

[PDF][PDF] AFM probes fabricated with masked–maskless combined anisotropic etching and p surface doping

J Han, X Li, H Bao, G Zuo, Y Wang, F Feng… - J. Micromech …, 2006 - scholar.archive.org
The paper presents a newly developed high-yield micro-fabrication technology for single-
crystalline silicon atomic force microscope (AFM) probes. Both the tips and the cantilevers …

[引用][C] AFM probes fabricated with masked-maskless combined anisotropic etching and p+ surface doping

J HAN, X LI, H BAO, G ZUO, Y WANG… - Journal of …, 2006 - Institute of Physics