Fabrication of novel silicon dual atomic force microscope tip with narrow gap

S Morita, T Mineta, E Makino, A Umino… - Journal of Micro …, 2009 - spiedigitallibrary.org
We propose a novel fabrication process for twin probes of an atomic force microscope (AFM)
that consist of a silicon dual tip with a narrow gap. The dual tip with a tetrahedral shape …

[引用][C] Fabrication of novel silicon dual atomic force microscope tip with narrow gap

S Morita - Journal of Micro/Nanolithography, MEMS, and MOEMS, 2009 - cir.nii.ac.jp
Fabrication of novel silicon dual atomic force microscope tip with narrow gap | CiNii
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