Preparation of RF sputtered AZO/Cu/AZO multilayer films and the investigation of Cu thickness and substrate effects on their microstructural and optoelectronic …

D Mendil, F Challali, T Touam, V Bockelee… - Journal of Alloys and …, 2021 - Elsevier
Highlights•AZO/Cu/AZO multilayer films were deposited on glass and quartz substrates by
RF magnetron sputter.•Effects of Cu thickness and substrate on the properties of …
被引用次数：35 相关文章

Preparation of RF sputtered AZO/Cu/AZO multilayer films and the investigation of Cu thickness and substrate effects on their microstructural and optoelectronic …

D Mendil, F Challali, T Touam, V Bockelée… - Journal of Alloys and …, 2021 - inis.iaea.org
[en] Highlights:• AZO/Cu/AZO multilayer films were deposited on glass and quartz substrates
by RF magnetron sputter.• Effects of Cu thickness and substrate on the properties of …