Influence of fabrication parameters on crystallization, microstructure, and surface composition of NbN thin films deposited by rf magnetron sputtering

JE Alfonso, J Buitrago, J Torres, JF Marco… - Journal of materials …, 2010 - Springer
In this work NbN thin films have been grown by magnetron rf sputtering of a δ-NbN (99.99%)
target. In particular, the influence of certain fabrication parameters (substrate temperature …
被引用次数：56 相关文章
[PDF] sbpmat.org.br

[PDF][PDF] Influence of Fabrication Parameters on Crystallization, Microstructure and Surface Composition of NbN Thin Films Deposited by RF Magnetron Sputtering.

JE Alfonso, J Buitrago, J Torres, JF Marco, B Santos - Target - sbpmat.org.br
Due to their mechanical properties, their high fusion point and their thermal and chemical
stability, transition metal nitrides present a great variety of applications spanning from hard …

Influence of fabrication parameters on crystallization, microstructure, and surface composition of NbN thin films deposited by rf magnetron sputtering

JE Alfonso, J Buitrago, J Torres, JF Marco… - Journal of Materials …, 2010 - infona.pl
In this work NbN thin films have been grown by magnetron rf sputtering of a δ-NbN (99.99%)
target. In particular, the influence of certain fabrication parameters (substrate temperature …

Influence of fabrication parameters on crystallization, microstructure, and surface composition of NbN thin films deposited by rf magnetron sputtering.

JE Alfonso, J Buitrago, J Torres… - Journal of Materials …, 2010 - search.ebscohost.com
In this work NbN thin films have been grown by magnetron rf sputtering of a δ-NbN (99.99%)
target. In particular, the influence of certain fabrication parameters (substrate temperature …
[PDF] researchgate.net

[PDF][PDF] Influence of Fabrication Parameters on Crystallization, Microstructure and Surface Composition of NbN Thin Films Deposited by RF Magnetron Sputtering.

JE Alfonso, J Buitrago, J Torres, JF Marco, B Santos - Target - researchgate.net
Due to their mechanical properties, their high fusion point and their thermal and chemical
stability, transition metal nitrides present a great variety of applications spanning from hard …

[引用][C] Influence of fabrication parameters on crystallization, microstructure, and surface composition of NbN thin films deposited by rf magnetron sputtering

JE Alfonso, J Buitrago, J Torres… - Journal of Materials …, 2010 - ui.adsabs.harvard.edu
Influence of fabrication parameters on crystallization, microstructure, and surface
composition of NbN thin films deposited by rf magnetron sputtering - NASA/ADS Now on …

Influence of fabrication parameters on crystallization, microstructure, and surface composition of NbN thin films deposited by rf magnetron sputtering

JE Alfonso, J Buitrago, J Torres, JF Marco… - Journal of Materials …, 2010 - go.gale.com
In this work NbN thin films have been grown by magnetron rf sputtering of a [delta]-NbN
(99.99%) target. In particular, the influence of certain fabrication parameters (substrate …

Influence of fabrication parameters on crystallization, microstructure, and surface composition of NbN thin films deposited by rf magnetron sputtering

JE Alfonso, J Buitrago, J Torres… - Journal of Materials …, 2010 - search.proquest.com
In this work NbN thin films have been grown by magnetron rf sputtering of a δ-NbN (99.99%)
target. In particular, the influence of certain fabrication parameters (substrate temperature …

Influence of fabrication parameters on crystallization, microstructure, and surface composition of NbN thin films deposited by rf magnetron sputtering.

JE Alfonso, J Buitrago, J Torres… - Journal of Materials …, 2010 - search.ebscohost.com
In this work NbN thin films have been grown by magnetron rf sputtering of a δ-NbN (99.99%)
target. In particular, the influence of certain fabrication parameters (substrate temperature …

[引用][C] Influence of fabrication parameters on crystallization, microstructure, and surface composition of NbN thin films deposited by rf magnetron sputtering

JE ALFONSO, J BUITRAGO, J TORRES… - Journal of materials …, 2010 - Springer