Nonselective etching of GaN/AlGaN heterostructures by Cl2/Ar/BCl3 inductively coupled plasmas

Y Han, S Xue, T Wu, Z Wu, W Guo, Y Luo, Z Hao… - Science in China Series …, 2004 - Springer
A systematic study of the nonselective and smooth etching of GaN/AlGaN heterostructures
was performed using Cl 2/Ar/BCl 3 inductively coupled plasmas (ICP). Nonselective etching …
被引用次数：16 相关文章

[引用][C] Nonselective etching of GaN/AlGaN heterostructures by Cl2/Ar/BCl3 inductively coupled plasmas

Y HAN - Science in China E: Technological Sciences, 2004 - ui.adsabs.harvard.edu
Nonselective etching of GaN/AlGaN heterostructures by Cl2/Ar/BCl3 inductively coupled
plasmas - NASA/ADS Now on home page ads icon ads Enable full ADS view NASA/ADS …

Nonselective etching of GaN/AlGaN heterostructures by Cl2/Ar/BCl3 inductively coupled plasmas

Y Han, S Xue, T Wu, Z Wu, W Guo, Y Luo, Z Hao… - Science China …, 2004 - infona.pl
A systematic study of the nonselective and smooth etching of GaN/AlGaN heterostructures
was performed using Cl2/Ar/BCl3 inductively coupled plasmas (ICP). Nonselective etching …

Nonselective etching of GaN/AlGaN heterostructures by Cl2/Ar/BCl3 inductively coupled plasmas

Y Han, S Xue, T Wu, Z Wu, W Guo, Y Luo, Z Hao… - Science China …, 2004 - infona.pl
A systematic study of the nonselective and smooth etching of GaN/AlGaN heterostructures
was performed using Cl2/Ar/BCl3 inductively coupled plasmas (ICP). Nonselective etching …

[引用][C] Nonselective etching of GaN/AlGaN heterostructures by Cl2/Ar/BCl3 inductively coupled plasmas

Y Han, S Xue, T Wu, Z Wu, W Guo, Y Luo, Z Hao… - Science in China. Series …, 2004 - Springer

[引用][C] Nonselective etching of GaN/AlGaN heterostructures by Cl2/Ar/BCl3 inductively coupled plasmas

Y Han, S Xue, T Wu, Z Wu, W Guo, Y Luo, Z Hao… - Science in China Series …, 2004 - Springer