Amorphous Si—the role of MeV implantation in elucidating defect and thermodynamic properties
JM Poate, S Coffa, DC Jacobson, A Polman… - Nuclear Instruments and …, 1991 - Elsevier
The role of MeV implantation in producing thick amorphous Si layers has been central in
elucidating several of its properties. The recent use of MeV Si beams to produce very pure …
elucidating several of its properties. The recent use of MeV Si beams to produce very pure …
Amorphous Si-the role of MeV implantation in elucidating defect and thermodynamic properties
JM Poate, S Coffa, DC Jacobson, A Polman… - … and Methods in …, 1991 - inis.iaea.org
[en] The role of MeV implantation in producing thick amorphous Si layers has been central in
elucidating several of its properties. The recent use of MeV Si beams to produce very pure …
elucidating several of its properties. The recent use of MeV Si beams to produce very pure …
[引用][C] Amorphous Si—the role of MeV implantation in elucidating defect and thermodynamic properties
JM Poate, S Coffa, DC Jacobson, A Polman… - … and Methods in …, 1991 - cir.nii.ac.jp
[PDF][PDF] Amorphous Si–the role of MeV implantation in elucidating defect and thermodynamic properties
F Spaepen, E Donovan - erbium.nl
The role of MeV implantation in producing thick amorphous Si layers has been central in
elucidating several of its properties. The recent use of MeV Si beams to produce very pure …
elucidating several of its properties. The recent use of MeV Si beams to produce very pure …
Amorphous Si—the role of MeV implantation in elucidating defect and thermodynamic properties
JM Poate, S Coffa, DC Jacobson… - … and Methods in …, 1991 - ui.adsabs.harvard.edu
The role of MeV implantation in producing thick amorphous Si layers has been central in
elucidating several of its properties. The recent use of MeV Si beams to produce very pure …
elucidating several of its properties. The recent use of MeV Si beams to produce very pure …
Amorphous Si-the role of MeV implantation in elucidating defect and thermodynamic properties
JM Poate, S Coffa, DC Jacobson, A Polman… - Nuclear Instruments and …, 1991 - osti.gov
The role of MeV implantation in producing thick amorphous Si layers has been central in
elucidating several of its properties. The recent use of MeV Si beams to produce very pure …
elucidating several of its properties. The recent use of MeV Si beams to produce very pure …