[HTML][HTML] Low temperature aluminum nitride thin films for sensory applications
A low-temperature sputter deposition process for the synthesis of aluminum nitride (AlN) thin
films that is attractive for applications with a limited temperature budget is presented …
films that is attractive for applications with a limited temperature budget is presented …
Low temperature aluminum nitride thin films for sensory applications
E Yarar, V Hrkac, C Zamponi, A Piorra… - AIP …, 2016 - ui.adsabs.harvard.edu
A low-temperature sputter deposition process for the synthesis of aluminum nitride (AlN) thin
films that is attractive for applications with a limited temperature budget is presented …
films that is attractive for applications with a limited temperature budget is presented …
Low temperature aluminum nitride thin films for sensory applications
E Yarar, C Zamponi, A Piorra, E Quandt, V Hrkac… - AIP Advances, 2016 - inis.iaea.org
[en] A low-temperature sputter deposition process for the synthesis of aluminum nitride (AlN)
thin films that is attractive for applications with a limited temperature budget is presented …
thin films that is attractive for applications with a limited temperature budget is presented …
[PDF][PDF] Low temperature aluminum nitride thin films for sensory applications
E Yarar, V Hrkac, C Zamponi, A Piorra, L Kienle… - cyberleninka.org
A low-temperature sputter deposition process for the synthesis of aluminum nitride (AlN) thin
films that is attractive for applications with a limited temperature budget is presented …
films that is attractive for applications with a limited temperature budget is presented …
Low temperature aluminum nitride thin films for sensory applications
E Yarar, V Hrkac, C Zamponi, A Piorra, L Kienle… - AIP Advances, 2016 - cir.nii.ac.jp
抄録< jats: p> A low-temperature sputter deposition process for the synthesis of aluminum
nitride (AlN) thin films that is attractive for applications with a limited temperature budget is …
nitride (AlN) thin films that is attractive for applications with a limited temperature budget is …
Low temperature aluminum nitride thin films for sensory applications
E Yarar, C Zamponi, A Piorra, V Hrkac, L Kienle - AIP Advances, 2016 - osti.gov
A low-temperature sputter deposition process for the synthesis of aluminum nitride (AlN) thin
films that is attractive for applications with a limited temperature budget is presented …
films that is attractive for applications with a limited temperature budget is presented …
Low temperature aluminum nitride thin films for sensory applications
E Yarar, V Hrkac, C Zamponi, A Piorra, L Kienle… - AIP Advances, 2016 - pubs.aip.org
A low-temperature sputter deposition process for the synthesis of aluminum nitride (AlN) thin
films that is attractive for applications with a limited temperature budget is presented …
films that is attractive for applications with a limited temperature budget is presented …