Real Time Control Strategy for Improving the Plasma Quality in Nonlinear Reactive Ion Etchers.

RE Tudoroiu, SM Radu… - Quality-Access to …, 2019 - search.ebscohost.com
The main objective of this paper is to investigate control tracking performance of a digital
Proportional Integral Derivative (PID) controller, used as an alternative to a continuous PID …
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Real Time Control Strategy for Improving the Plasma Quality in Nonlinear Reactive Ion Etchers

RE Tudoroiu, SM Radu, N Tudoroiu - Calitatea, 2019 - search.proquest.com
The main objective of this paper is to investigate control tracking performance of a digital
Proportional Integral Derivative (PID) controller, used as an alternative to a continuous PID …