High quality factor silicon cantilever driven by piezoelectric thin film actuator for resonant based mass detection
J Lu, T Ikehara, Y Zhang, T Mihara, T Itoh… - Microsystem …, 2009 - Springer
A high quality factor (Q-factor) piezoelectric lead zirconate titanate (PZT) thin film actuated
single crystal silicon cantilever was proposed in this paper for resonant based ultra sensitive …
single crystal silicon cantilever was proposed in this paper for resonant based ultra sensitive …
High quality factor silicon cantilever driven by piezoelectric thin film actuator for resonant based mass detection
J Lu, T Ikehara, Y Zhang, T Mihara… - Microsystem …, 2009 - ui.adsabs.harvard.edu
A high quality factor (Q-factor) piezoelectric lead zirconate titanate (PZT) thin film actuated
single crystal silicon cantilever was proposed in this paper for resonant based ultra sensitive …
single crystal silicon cantilever was proposed in this paper for resonant based ultra sensitive …
High quality factor silicon cantilever driven by piezoelectric thin film actuator for resonant based mass detection
J Lu, T Ikehara, Y Zhang, T Mihara… - Microsystem …, 2009 - search.proquest.com
A high quality factor (Q-factor) piezoelectric lead zirconate titanate (PZT) thin film actuated
single crystal silicon cantilever was proposed in this paper for resonant based ultra sensitive …
single crystal silicon cantilever was proposed in this paper for resonant based ultra sensitive …
[引用][C] High quality factor silicon cantilever driven by piezoelectric thin film actuator for resonant based mass detection
J LU, T IKEHARA, YI ZHANG, T MIHARA… - Microsystem …, 2009 - pascal-francis.inist.fr
High quality factor silicon cantilever driven by piezoelectric thin film actuator for resonant
based mass detection CNRS Inist Pascal-Francis CNRS Pascal and Francis Bibliographic …
based mass detection CNRS Inist Pascal-Francis CNRS Pascal and Francis Bibliographic …
High quality factor silicon cantilever driven by piezoelectric thin film actuator for resonant based mass detection
J Lu, T Ikehara, Y Zhang, T Mihara, T Itoh… - Microsystem …, 2009 - dl.acm.org
A high quality factor (Q-factor) piezoelectric lead zirconate titanate (PZT) thin film actuated
single crystal silicon cantilever was proposed in this paper for resonant based ultra sensitive …
single crystal silicon cantilever was proposed in this paper for resonant based ultra sensitive …
High quality factor silicon cantilever driven by piezoelectric thin film actuator for resonant based mass detection
J Lu, T Ikehara, Y Zhang, T Mihara, T Itoh… - Microsystem …, 2009 - infona.pl
A high quality factor (Q-factor) piezoelectric lead zirconate titanate (PZT) thin film actuated
single crystal silicon cantilever was proposed in this paper for resonant based ultra sensitive …
single crystal silicon cantilever was proposed in this paper for resonant based ultra sensitive …