Design fabrication and characterization of an in-plane AFM probe with ultra-sharp silicon nitride tip

E Sarajlic, JW Berenschot, MH Siekman… - 21st Micromechanics …, 2010 - research.utwente.nl
Scanning rates of the atomic force microscope (AFM) could be significantly increased by
integrating the force sensing probe with microelectromechanical systems (MEMS). We …
被引用次数：5 相关文章
[PDF] utwente.nl

[PDF][PDF] DESIGN, FABRICATION AND CHARACTERIZATION OF AN IN-PLANE AFM PROBE WITH ULTRA-SHARP SILICON NITRIDE TIP

E Sarajlic, J Geerlings, JW Berenschot, MH Siekman… - research.utwente.nl
Scanning rates of the atomic force microscope (AFM) could be significantly increased by
integrating the force sensing probe with microelectromechanical systems (MEMS). We …
[PDF] utwente.nl

[PDF][PDF] DESIGN, FABRICATION AND CHARACTERIZATION OF AN IN-PLANE AFM PROBE WITH ULTRA-SHARP SILICON NITRIDE TIP

E Sarajlic, J Geerlings, JW Berenschot, MH Siekman… - ris.utwente.nl
Scanning rates of the atomic force microscope (AFM) could be significantly increased by
integrating the force sensing probe with microelectromechanical systems (MEMS). We …
[PDF] researchgate.net

[PDF][PDF] DESIGN, FABRICATION AND CHARACTERIZATION OF AN IN-PLANE AFM PROBE WITH ULTRA-SHARP SILICON NITRIDE TIP

E Sarajlic, J Geerlings, JW Berenschot, MH Siekman… - researchgate.net
Scanning rates of the atomic force microscope (AFM) could be significantly increased by
integrating the force sensing probe with microelectromechanical systems (MEMS). We …
[PDF] utwente.nl

[PDF][PDF] DESIGN, FABRICATION AND CHARACTERIZATION OF AN IN-PLANE AFM PROBE WITH ULTRA-SHARP SILICON NITRIDE TIP

E Sarajlic, J Geerlings, JW Berenschot, MH Siekman… - ris.utwente.nl
Scanning rates of the atomic force microscope (AFM) could be significantly increased by
integrating the force sensing probe with microelectromechanical systems (MEMS). We …