Calibration of step heights and roughness measurements with atomic force microscopes

J Garnaes, N Kofod, A Kühle, C Nielsen… - Precision engineering, 2003 - Elsevier
In this paper we present a method for the vertical calibration of a metrological atomic force
microscope (AFM), which can be applied to most AFM systems with distance sensors. A …
被引用次数：77 相关文章

Calibration of step heights and roughness measurements with atomic force microscopes

J Garnaes, N Kofod, A Kuhle, C Nielson… - Precision …, 2002 - eprints.hud.ac.uk
In this paper we present a method for the vertical calibration of a metrological atomic force
microscope (AFM), which can be applied to most AFM systems with distance sensors. A …

[引用][C] Calibration of step heights and roughness measurements with atomic force microscopes

J Garnaes, N Kofod, A Kühle, C Nielsen… - Precision …, 2003 - cir.nii.ac.jp

[引用][C] Calibration of step heights and roughness measurements with atomic force microscopes

J GARNAES, N KOFND, A KÜHLE… - Precision …, 2003 - pascal-francis.inist.fr
Calibration of step heights and roughness measurements with atomic force microscopes
CNRS Inist Pascal-Francis CNRS Pascal and Francis Bibliographic Databases Simple search …

Calibration of step heights and roughness measurements with atomic force microscopes

J Garnaes, N Kofod, A Kuhle, C Nielsen… - Precision …, 2003 - elibrary.ru
In this paper we present a method for the vertical calibration of a metrological atomic force
microscope (AFM), which can be applied to most AFM systems with distance sensors. A …

Calibration of step heights and roughness measurements with atomic force microscopes

J Garnaes, N Kofod, A Kühle, C Nielsen… - Precision …, 2003 - infona.pl
In this paper we present a method for the vertical calibration of a metrological atomic force
microscope (AFM), which can be applied to most AFM systems with distance sensors. A …

Calibration of step heights and roughness measurements with atomic force microscopes

J Garnaes, N Kofod, A Kühle, C Nielsen… - Precision …, 2003 - pure.hud.ac.uk
In this paper we present a method for the vertical calibration of a metrological atomic force
microscope (AFM), which can be applied to most AFM systems with distance sensors. A …

[引用][C] Calibration of step heights and roughness measurements with atomic force microscopes

J GARNAES, N KOFND, A KÜHLE, C NIELSEN… - Precision …, 2003 - Elsevier