Effect of pad groove design on slurry injection scheme during interlayer dielectric chemical mechanical planarization

C Wu, Y Sampurno, X Liao, Y Zhuang… - ECS Journal of Solid …, 2015 - iopscience.iop.org
In this study, the effect of pad groove design on slurry injection scheme during interlayer
dielectric chemical mechanical planarization was investigated. A novel slurry injection …
被引用次数：17 相关文章
[PDF] researchgate.net

[PDF][PDF] Effect of Pad Groove Design on Slurry Injection Scheme during Interlayer Dielectric Chemical Mechanical Planarization

C Wu, Y Sampurno, X Liao, Y Zhuang, L Borucki… - 2015 - researchgate.net
In this study, the effect of pad groove design on slurry injection scheme during interlayer
dielectric chemical mechanical planarization was investigated. A novel slurry injection …
[PDF] cyberleninka.org

[PDF][PDF] Effect of Pad Groove Design on Slurry Injection Scheme during Interlayer Dielectric Chemical Mechanical Planarization

C Wu, Y Sampurno, X Liao, Y Zhuang, L Borucki… - 2015 - cyberleninka.org
In this study, the effect of pad groove design on slurry injection scheme during interlayer
dielectric chemical mechanical planarization was investigated. A novel slurry injection …