Atomic-scale etching mechanism of aluminum with fluorine-based plasma

A Asaduzzaman - The Journal of Physical Chemistry C, 2022 - ACS Publications
A first-principles density functional theory study has been carried out to investigate the
etching and corrosion of aluminum with fluorine-based plasma. Aluminum is modeled with …
被引用次数：5 相关文章

Atomic-Scale Etching Mechanism of Aluminum with Fluorine-Based Plasma

A Asaduzzaman - Journal of Physical Chemistry C, 2022 - pure.psu.edu
A first-principles density functional theory study has been carried out to investigate the
etching and corrosion of aluminum with fluorine-based plasma. Aluminum is modeled with …

Atomic-scale etching mechanism of aluminum with fluorine-based plasma

A Asaduzzaman - 2022 - scholarsphere.psu.edu
A first-principles density functional theory study has been carried out to investigate the
etching and corrosion of aluminum with fluorine-based plasma. Aluminum is modeled with …