Development of highly integrated quartz micro-electro-mechanical system tilt sensor

J Liang, F Kohsaka, T Matsuo, X Li… - Japanese journal of …, 2009 - iopscience.iop.org
In this paper, we report the research progress of a recently developed quartz micro-electro-
mechanical system (MEMS)-based capacitive tilt sensor using bulk micromachining …
被引用次数：9 相关文章

Development of highly integrated quartz micro-electro-mechanical system tilt sensor

J Liang, F Kohsaka, T Matsuo, X Li… - … Journal of Applied …, 2009 - waseda.elsevierpure.com
抄録 In this paper, we report the research progress of a recently developed quartz micro-
electro-mechanical system (MEMS)-based capacitive tilt sensor using bulk micromachining …

[引用][C] Development of Highly Integrated Quartz Micro-Electro-Mechanical System Tilt Sensor

J Liang, F Kohsaka, T Matsuo, X Li… - Japanese Journal of …, 2009 - cir.nii.ac.jp
Development of Highly Integrated Quartz Micro-Electro-Mechanical System Tilt Sensor | CiNii
Research CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ] 詳細へ移動 検索フォームへ移動 …

Development of Highly Integrated Quartz Micro-Electro-Mechanical System Tilt Sensor

J Liang, F Kohsaka, T Matsuo, X Li… - … Journal of Applied …, 2009 - ui.adsabs.harvard.edu
In this paper, we report the research progress of a recently developed quartz micro-electro-
mechanical system (MEMS)-based capacitive tilt sensor using bulk micromachining …

[引用][C] Development of highly integrated quartz micro-electro-mechanical system tilt sensor

J Liang, F Kohsaka, T Matsuo - Japanese journal of applied physics …, 2009 - cir.nii.ac.jp
Development of highly integrated quartz micro-electro-mechanical system tilt sensor | CiNii
Research CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ] 詳細へ移動 検索フォームへ移動 …

Development of highly integrated quartz micro-electro-mechanical system tilt sensor

J Liang, F Kohsaka, T Matsuo, X Li… - … Journal of Applied …, 2009 - waseda.elsevierpure.com
In this paper, we report the research progress of a recently developed quartz micro-electro-
mechanical system (MEMS)-based capacitive tilt sensor using bulk micromachining …