Multilayer thickness determination using continuous wave THz spectroscopy

D Stanze, B Globisch, RJB Dietz… - IEEE Transactions …, 2014 - ieeexplore.ieee.org
We present a multilayer thickness measurement system based on optoelectronic continuous
wave THz spectroscopy. Due to its wide tuning range, high frequency resolution, and fast …
被引用次数：39 相关文章

Multilayer Thickness Determination Using Continuous Wave THz Spectroscopy

D Stanze, B Globisch, RJB Dietz, H Roehle… - IEEE Transactions on …, 2014 - infona.pl
We present a multilayer thickness measurement system based on optoelectronic continuous
wave THz spectroscopy. Due to its wide tuning range, high frequency resolution, and fast …

Multilayer thickness determination using continuous wave THz spectroscopy

D Stanze, B Globisch, RJB Dietz, H Roehle, T Göbel… - 2014 - publica.fraunhofer.de
We present a multilayer thickness measurement system based on optoelectronic continuous
wave THz spectroscopy. Due to its wide tuning range, high frequency resolution, and fast …

[引用][C] Multilayer Thickness Determination Using Continuous Wave THz Spectroscopy

D Stanze, B Globisch, RJB Dietz… - IEEE Transactions …, 2014 - ui.adsabs.harvard.edu
Multilayer Thickness Determination Using Continuous Wave THz Spectroscopy - NASA/ADS Now
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