Fabrication of novel cantilever with nanotip for AFM applications

L Li, X Han, W Wu, F Ding… - 2008 9th International …, 2008 - ieeexplore.ieee.org
As a first step to realize novel cantilevers to be used in the atomic force microscopy (AFM),
we have fabricated a Poly-Si cantilever with enhanced high-aspect-ratio nanotips. The tips …
被引用次数：4 相关文章

Fabrication of novel cantilever with nanotip for AFM applications

L Li, X Han, W Wu, F Ding, Q Chen - 2008 9th International Conference on Solid … - infona.pl
As a first step to realize novel cantilevers to be used in the atomic force microscopy (AFM),
we have fabricated a Poly-Si cantilever with enhanced high-aspect-ratio nanotips. The tips …