Extension of the range of profile surface roughness measurements using metrological atomic force microscope

I Misumi, K Sugawara, R Kizu, A Hirai, S Gonda - Precision Engineering, 2019 - Elsevier
The calibration service of profile surface roughness by using a metrological atomic force
microscope is now available at National Metrology Institute of Japan (NMIJ), AIST. The …
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[引用][C] Extension of the range of profile surface roughness measurements using metrological atomic force microscope

I Misumi, K Sugawara, R Kizu, A Hirai, S Gonda - Precision Engineering, 2019 - cir.nii.ac.jp
Extension of the range of profile surface roughness measurements using metrological atomic
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