The effect of noise on capacitive measurements of MEMS geometries

JL Chee, JV Clark - Experimental and Applied Mechanics, Volume 6 …, 2011 - Springer
Small variations in the geometry of Micro Electro Mechanical Systems (MEMS) can yield
very large variations in performance. Variations in geometry are a consequence of the …
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The Effect of Noise on Capacitive Measurements of MEMS Geometries

JL Chee, JV Clark - Experimental and Applied Mechanics, Volume 6 - infona.pl
Small variations in the geometry of Micro Electro Mechanical Systems (MEMS) can yield
very large variations in performance. Variations in geometry are a consequence of the …

The Effect of Noise on Capacitive Measurements of MEMS Geometries

JL Chee, JV Clark - … Mechanics, Volume 6: Proceedings of the …, 2011 - books.google.com
Small variations in the geometry of Micro Electro Mechanical Systems (MEMS) can yield
very large variations in performance. Variations in geometry are a consequence of the …

[引用][C] The Effect of Noise on Capacitive Measurements of MEMS Geometries

JL Chee, JV Clark - Experimental and Applied Mechanics, Volume 6, 2011 - Springer