Sensitivity improvement of a microcantilever based mass sensor

M Narducci, E Figueras, MJ Lopez, I Gracia… - Microelectronic …, 2009 - Elsevier
This article describes two approaches for sensitivity improvement of a micromachined silicon
T-shaped cantilever resonator for mass sensing applications. In order to increase sensitivity …
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[引用][C] Sensitivity improvement of a microcantilever based mass sensor

M NARDUCCI, E FIGUERAS… - Microelectronic …, 2009 - pascal-francis.inist.fr
Sensitivity improvement of a microcantilever based mass sensor CNRS Inist Pascal-Francis CNRS
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[引用][C] Sensitivity improvement of a microcantilever based mass sensor

M Narducci, E Figueras, MJ Lopez, I Gràcia… - Microelectronic …, 2009 - cir.nii.ac.jp
Sensitivity improvement of a microcantilever based mass sensor | CiNii Research CiNii 国立
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Sensitivity improvement of a microcantilever based mass sensor

M Narducci, E Figueras, MJ Lopez, I Grícia… - Microelectronic …, 2009 - dl.acm.org
This article describes two approaches for sensitivity improvement of a micromachined silicon
T-shaped cantilever resonator for mass sensing applications. In order to increase sensitivity …

[引用][C] Sensitivity improvement of a microcantilever based mass sensor

M Narducci, E Figueras, MJ Lopez, I Gràcia… - Microelectronic …, 2009 - elibrary.ru

Sensitivity improvement of a microcantilever based mass sensor

M Narducci, E Figueras, MJ Lopez, I Gràcia… - Microelectronic …, 2009 - infona.pl
This article describes two approaches for sensitivity improvement of a micromachined silicon
T-shaped cantilever resonator for mass sensing applications. In order to increase sensitivity …
[PDF] academia.edu

[PDF][PDF] Sensitivity improvement of a microcantilever based mass sensor

M Narducci, E Figueras, MJ Lopez, I Gràcia… - Microelectronic …, 2009 - academia.edu
abstract This article describes two approaches for sensitivity improvement of a
micromachined silicon T-shaped cantilever resonator for mass sensing applications. In order …

[引用][C] Sensitivity improvement of a microcantilever based mass sensor

M NARDUCCI, E FIGUERAS, MJ LOPEZ… - Microelectronic …, 2009 - Elsevier