Si, SiGe, and Si (1− y) Cy on Si: Epitaxy of Group-IV Semiconductors for Nanoelectronics

JM Hartmann - Thin Films On Silicon: Electronic And Photonic …, 2016 - books.google.com
Group-IV epitaxy is nowadays considered as a key enabler in Complementary Metal Oxyde
Semiconductor (CMOS) devices, Bipolar and BiCMOS transistors, near infra-red photo …

[引用][C] Si, SiGe, and Si1 −yCy on Si: Epitaxy of Group-IV Semiconductors for Nanoelectronics

JM Hartmann - THIN FILMS ON SILICON: Electronic and Photonic …, 2017 - World Scientific
Thin Films on Silicon : Si, SiGe, and Si1 −yCy on Si: Epitaxy of Group-IV Semiconductors for
Nanoelectronics Page 1 Chapter 1 Si, SiGe, and Si1−yCy on Si: Epitaxy of Group-IV …