Operation of nanomechanical resonant structures in air
M Zalalutdinov - Applied Physics Letters, 2002 - pubs.aip.org
We report on the resonant operation of high-quality-factor silicon nanomechanical structures
in air and at room temperature. We describe techniques used to actuate and detect …
in air and at room temperature. We describe techniques used to actuate and detect …
[PDF][PDF] Operation of nanomechanical resonant structures in air
L Sekaric, M Zalalutdinov, RB Bhiladvala… - APPLIED PHYSICS …, 2002 - engr.uvic.ca
We report on the resonant operation of high-quality-factor silicon nanomechanical structures
in air and at room temperature. We describe techniques used to actuate and detect …
in air and at room temperature. We describe techniques used to actuate and detect …
Operation of nanomechanical resonant structures in air
L Sekaric, M Zalalutdinov, RB Bhiladvala… - Applied Physics …, 2002 - ui.adsabs.harvard.edu
We report on the resonant operation of high-quality-factor silicon nanomechanical structures
in air and at room temperature. We describe techniques used to actuate and detect …
in air and at room temperature. We describe techniques used to actuate and detect …
[引用][C] Operation of nanomechanical resonant structures in air
L Sekaric, M Zalalutdinov, RB Bhiladvala… - Applied Physics …, 2002 - pubs.aip.org
We report on the resonant operation of high-quality-factor silicon nanomechanical structures
in air and at room temperature. We describe techniques used to actuate and detect …
in air and at room temperature. We describe techniques used to actuate and detect …
[PDF][PDF] Operation of nanomechanical resonant structures in air
L Sekaric, M Zalalutdinov… - APPLIED …, 2002 - parpia.lassp.cornell.edu
We report on the resonant operation of high-quality-factor silicon nanomechanical structures
in air and at room temperature. We describe techniques used to actuate and detect …
in air and at room temperature. We describe techniques used to actuate and detect …
[PDF][PDF] Operation of nanomechanical resonant structures in air
L Sekaric, M Zalalutdinov, RB Bhiladvala… - APPLIED PHYSICS …, 2002 - scholar.archive.org
We report on the resonant operation of high-quality-factor silicon nanomechanical structures
in air and at room temperature. We describe techniques used to actuate and detect …
in air and at room temperature. We describe techniques used to actuate and detect …
[PDF][PDF] Operation of nanomechanical resonant structures in air
L Sekaric, M Zalalutdinov, RB Bhiladvala… - APPLIED PHYSICS …, 2002 - engr.uvic.ca
We report on the resonant operation of high-quality-factor silicon nanomechanical structures
in air and at room temperature. We describe techniques used to actuate and detect …
in air and at room temperature. We describe techniques used to actuate and detect …