source/drain fabrication process using preselectively doped single‐crystal silicon
nanomembranes (SiNM) is an effective approach to realizing high device speed. However,
further downscaling this approach has become difficult in lithography alignment. In this full
paper, a local alignment scheme in combination with more accurate SiNM transfer measures
for minimizing alignment errors is reported. By realizing 1 μm channel alignment for the …