… 300 mm BEOL compatible growth methods for 2D materials. We reveal the ultra-scaling of
interconnect barriers with a 10 Å 2D BEOL … Furthermore, we present a novel BEOL passivation …

… electronic-grade 2D materials [14–17]. However, materials processed at the BEOL level are
… Instead, one can consider BEOL as a complementary focus area, where 2D semiconductors …

… Importantly, the results presented in this paper can provide physical insight into the fundamental
limits of contact engineering for 2D materials and can guide experimental investigations …

… scattering with the presence of 2D barriers. Directly grown graphene by … Conclusion: In
summary, 2D materials are demonstrated as … of 2D materials with the standard BEOL processes. …

… BEOL) 3D-integrated FETs, and low-cost thin-film FETs (or TFTs) each demonstrated. We find
that 2D materials … crystalline quality of 2D materials grown directly onto the BEOL layers, as …

… The introduction of 2D materials also allows to include transistor functionality in the BEOL
(fig.1). The planar nature of 2D materials facilitates the BEOL integration over the front end …

… The adhesion property is the most critical factor to determine whether a 2D material can
be adopted in the BEOL technology. The weak van der Waals layer-to-layer interaction in …

… These conditions were chosen to be as close as possible to those at which 2D materials
are usually exposed during device fabrication steps [50, 51], ie dielectric deposition, metal …

… : Oxide Semiconductor and 2D Materials for M3D integration. … our investigation of the 2D
material opportunities for 3D memories… -material integration as well as low-temperature material …

… , BEOL layer and interlayer dielectric (ILD) layer. Monolithic inter-tier-via (MIV) connects
adjacent tiers and has similar diameters as vias in the BEOL … budget causes BEOL degradation, …