voltage of 3100 V and a forward current of 12 A is reported. This is the highest reported
power handling capability of 37 kW for a single device in SiC. The 5-epilayer structure
utilized a blocking layer that was 50 μm thick, p-type, doped at about 7-9× 10/sup 14/cm/sup-
3/. The devices were terminated with a single zone junction termination extension (JTE)
region formed by ion-implantation of nitrogen at 650/spl deg/C. The device was able to …