4-Mb MOSFET-selected/spl mu/trench phase-change memory experimental chip

F Bedeschi, R Bez, C Boffino… - IEEE journal of solid …, 2005 - ieeexplore.ieee.org
F Bedeschi, R Bez, C Boffino, E Bonizzoni, EC Buda, G Casagrande, L Costa, M Ferraro…
IEEE journal of solid-state circuits, 2005ieeexplore.ieee.org
A/spl mu/trench Phase-Change Memory (PCM) cell with MOSFET selector and its integration
in a 4-Mb experimental chip fabricated in 0.18-/spl mu/m CMOS technology are presented. A
cascode bitline biasing scheme allows read and write voltages to be fed to the addressed
storage elements with the required accuracy. The high-performance capabilities of PCM
cells were experimentally investigated. A read access time of 45 ns was measured together
with a write throughput of 5 MB/s, which represents an improved performance as compared …
A /spl mu/trench Phase-Change Memory (PCM) cell with MOSFET selector and its integration in a 4-Mb experimental chip fabricated in 0.18-/spl mu/m CMOS technology are presented. A cascode bitline biasing scheme allows read and write voltages to be fed to the addressed storage elements with the required accuracy. The high-performance capabilities of PCM cells were experimentally investigated. A read access time of 45 ns was measured together with a write throughput of 5 MB/s, which represents an improved performance as compared to NOR Flash memories. Programmed cell current distributions on the 4-Mb array demonstrate an adequate working window and, together with first endurance measurements, assess the feasibility of PCMs in standard CMOS technology with few additional process modules.
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