A method for cross-sensitivity and pull-in voltage measurement of MEMS two-axis accelerometers
An electronic circuit for the characterization of two-axis accelerometers is presented,
implementing a non-linear method which reduces the effect of parasitic signals. Single-
ended and differential measurements were used to extract a value of 0.15 for the cross-
sensitivity of the device. Other parameters, like the pull-in voltage, the quality factors and the
resonance frequencies, are extracted as well. Curves of the frequency response at different
pressure levels, and with different dc bias voltages are presented.
implementing a non-linear method which reduces the effect of parasitic signals. Single-
ended and differential measurements were used to extract a value of 0.15 for the cross-
sensitivity of the device. Other parameters, like the pull-in voltage, the quality factors and the
resonance frequencies, are extracted as well. Curves of the frequency response at different
pressure levels, and with different dc bias voltages are presented.
An electronic circuit for the characterization of two-axis accelerometers is presented, implementing a non-linear method which reduces the effect of parasitic signals. Single-ended and differential measurements were used to extract a value of 0.15 for the cross-sensitivity of the device. Other parameters, like the pull-in voltage, the quality factors and the resonance frequencies, are extracted as well. Curves of the frequency response at different pressure levels, and with different dc bias voltages are presented.
Elsevier
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