A multilayer structure for Love-mode acoustic sensors
J Du, GL Harding - Sensors and Actuators A: Physical, 1998 - Elsevier
J Du, GL Harding
Sensors and Actuators A: Physical, 1998•ElsevierA novel multilayer structure, consisting of polymer/SiO2/ST-quartz, has been evaluated for
Love-mode acoustic sensors. The properties of these new devices have been compared
with those of SiO2/quartz and polymer/quartz devices. Mass sensitivity, insertion loss,
temperature coefficient of the oscillation frequency and frequency stability are studied as a
function of the layer thickness. Optimized devices exhibit higher sensitivity than both the
SiO2/quartz and the polymer/quartz devices produced here. Reduced temperature …
Love-mode acoustic sensors. The properties of these new devices have been compared
with those of SiO2/quartz and polymer/quartz devices. Mass sensitivity, insertion loss,
temperature coefficient of the oscillation frequency and frequency stability are studied as a
function of the layer thickness. Optimized devices exhibit higher sensitivity than both the
SiO2/quartz and the polymer/quartz devices produced here. Reduced temperature …
A novel multilayer structure, consisting of polymer/SiO2/ST-quartz, has been evaluated for Love-mode acoustic sensors. The properties of these new devices have been compared with those of SiO2/quartz and polymer/quartz devices. Mass sensitivity, insertion loss, temperature coefficient of the oscillation frequency and frequency stability are studied as a function of the layer thickness. Optimized devices exhibit higher sensitivity than both the SiO2/quartz and the polymer/quartz devices produced here. Reduced temperature coefficient of frequency can be obtained in the polymer/SiO2/ST-quartz devices due to a compensating effect of the polymer and SiO2 films. Some of the devices have been operated efficiently in water with good stability, which is promising for biosensing applications.
Elsevier
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