Nanotechnology has received a considerable amount of attention from various fields and has become a multidisciplinary subject, where several research ventures have taken place in recent years. This field is expected to affect every sector of our economy and daily life in the near future. Besides advances in physics, chemistry, biology, and other science-based technologies, the use of statistical methods has also helped the rapid development of nanotechnology in terms of data collection, treatment-effect estimation, hypothesis testing, and quality control. This paper reviews some instances where statistical methods have been used in nanoscale applications. Topics include experimental design, uncertainty modeling, process optimization and monitoring, and areas for future research efforts.