… practice of atomic layer deposition (ALD) for thin-film growth … Various types of metal-containing
precursors including … alkyls and cyclopentadienyl compounds seem most suitable for ALD …

… were processed by ALD using novel cyclopentadienyl (Cp, -… ALD, which has been identified
as an important thin film growth … and cyclopentadienyl compounds, can be exploited in ALD …

… metal containing precursors that have been used in ALD are … , 345382 using Sr and Ba
cyclopentadienyl compounds as … achieved in the ALD STO films and the films were crystalline …

… ALD of electropositive metal and metal-containing films was evaluated. A major discovery
has been the deposition of aluminum metal films by thermal ALD using … purely thermal ALD to …

… transportation of a volatile metal-containing precursor in the … be demonstrated that some
compounds can be employed to … and Hf alkoxide and cyclopentadienyl complexes which give …

… cyclopentadienyl-type compounds, viz. Cp 3 Sc 27 and Cp 2 Zr(CH 3 ) 2 , 28 have been
used as metal-containing … Sc 2 O 3 and ZrO 2 thin films by ALD, respectively. In these studies, …

… ALD precursors, as well as the deposition of rare-earth-metal-containing thin films via CVD
and ALD … Recent studies of guanidinate compounds and their applications in CVD and ALD …

… Cyclopentadienyl precursors are especially popular in ALD of the … A mixed alkoxide-cyclopentadienyl
titanium compound has … the combination of metal-containing precursor ML4 and an …

… for CVD and ALD precursors and a variety of metal-containing guanidinate compounds with
… Amidinates and guanidinates have been widely used as alternatives to cyclopentadienyl …

… containing ternary compound (Cr-Ti-O) thin films were grown … , heteroleptic precursors
including cyclopentadienyl (Cp) … gas phase transport of metal containing molecules into a reaction …