An electrostatic energy harvester with electret bias
E Halvorsen, ER Westby, S Husa, A Vogl… - … Solid-State Sensors …, 2009 - ieeexplore.ieee.org
TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators …, 2009•ieeexplore.ieee.org
We have designed, fabricated and characterized a MEMS electrostatic energy harvester
using an electret as internal bias. The device operates in continuous mode and features a
high voltage output, a large travelling distance of a big mass within a compact design using
full bulk silicon thickness. The output power is about 1 muW at an acceleration power
spectral density of 0.03 g 2/Hz.
using an electret as internal bias. The device operates in continuous mode and features a
high voltage output, a large travelling distance of a big mass within a compact design using
full bulk silicon thickness. The output power is about 1 muW at an acceleration power
spectral density of 0.03 g 2/Hz.
We have designed, fabricated and characterized a MEMS electrostatic energy harvester using an electret as internal bias. The device operates in continuous mode and features a high voltage output, a large travelling distance of a big mass within a compact design using full bulk silicon thickness. The output power is about 1 muW at an acceleration power spectral density of 0.03g 2 /Hz.
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