Mass Flow Control Using Estimated Output Feedback in Semiconductor Processes

K Takijiri, K Nakata, D Hayashi - Available at SSRN 4935882 - papers.ssrn.com
… Apparatus and method for pressure fluctuation insensitive mass flow control. Patent No.US …
Compensation of pressure disturbance for flow control equipment without pressure sensor by …

A novel numerical simulation method to verify turbulence models for predicting flow patterns in control valves

L Zeng, G Liu, J Mao, Q Yuan, S Wang… - Journal of Fluid …, 2015 - jstage.jst.go.jp
… He proved that a rotating high-pressure fluctuation at the … pressure ratios, while the two
values seem insensitive to … , the errors of mass flow and unload room pressure are less than 3% …

Explosive synthesis: novel intrinsically safe method and application with micro-channel reactor

Y Weifei, W Zhiyong, X Ruijuan, F Mei… - Journal of Physics …, 2020 - iopscience.iop.org
… 3℃, and the flux fluctuation of reactant flow were measured to be no … method, the apparatus,
and application in TATB synthesis … -sensitive ingredient and acute exothermic reactions. …

Control of a channel-flow behind a backward-facing step by suction/blowing

V Uruba, P Jonáš, O Mazur - International Journal of Heat and Fluid Flow, 2007 - Elsevier
… coefficient (mass flow through the slot over mass flow above … While suction effectiveness
is relatively insensitive to the slot … The reattachment point fluctuations seem to be damped by …

[PDF][PDF] Discharged flow oscillation in a long heated tube

H Andoh - 1964 - dspace.mit.edu
… ifunction in two-phase flow, the apparatus was operated with a … mass flow rate: the pressure
drop through the flow control … void fraction is not sensitive to variations of the subcooling at …

The S-statistic as an early warning of entrainment in a fluidized bed dryer containing pharmaceutical granule

G Chaplin, T Pugsley, C Winters - Powder technology, 2005 - Elsevier
… to measurements of pressure fluctuations. This technique … when applied to pressure fluctuations
collected in a fluidized … shown to be insensitive to the small variations in bed mass and …

Crossflow instability in a hypersonic boundary layer

SA Craig, WS Saric - Journal of Fluid Mechanics, 2016 - cambridge.org
… To this end, the experimental apparatus and method are … of the mass flux and its high-frequency
fluctuations about the mean. … The wire is nearly insensitive to ρwn along its axis and …

A method to compensate the pressure sensitivity of integrated thermal flow sensors

P Bruschi, M Dei, M Piotto - IEEE Sensors Journal, 2010 - ieeexplore.ieee.org
… In this work we propose an original pressure compensation method that exploits the same …
Ambrosina, “Apparatus and method for pressure fluctuation insensitive mass flow control,” US …

流量制御機器の外乱モデルとIMC によるセンサレス圧力外乱抑制

瀧尻興太郎, 境行男, 杉江俊治 - 計測自動制御学会論文集, 2020 - jstage.jst.go.jp
… This paper proposes a robust control method without any pressure sensor. A mathematical
… Ambrosina: Apparatus and method for pressure fluctuation insensitive mass flow control, US …

Gravitational surface vortex formation and suppression control: A review from hydrodynamic characteristics

G Zheng, Z Gu, W Xu, B Lu, Q Li, Y Tan, C Wang, L Li - Processes, 2022 - mdpi.com
… a surface vortex and pressure fluctuation under gravity. It affects the flow stability and turbine
performance … Studying vortex dynamics must increase the control’s efficacy and the device’s …