Atmospheric pressure microplasma jet as a depositing tool
J Benedikt, K Focke, A Yanguas-Gil… - Applied Physics …, 2006 - pubs.aip.org
An atmospheric pressure microplasma jet is developed for depositing homogeneous thin
films from C 2 H 2. The adjustment of the gas flow through the microplasma jet assures
optimal flow conditions as well as minimizes deposition inside the jet. In addition, the
formation of an argon boundary layer surrounding the emerging plasma beam separates the
ambient atmosphere from the flow of growth precursor. Thereby the incorporation of nitrogen
and oxygen from the ambient atmosphere into the deposited film is suppressed. Soft …
films from C 2 H 2. The adjustment of the gas flow through the microplasma jet assures
optimal flow conditions as well as minimizes deposition inside the jet. In addition, the
formation of an argon boundary layer surrounding the emerging plasma beam separates the
ambient atmosphere from the flow of growth precursor. Thereby the incorporation of nitrogen
and oxygen from the ambient atmosphere into the deposited film is suppressed. Soft …
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