… Here, we present an ALE process for nanoscale pattern transfer … etch fidelity and is inherently
a damage-free etch technique with … Permission may be obtained from ACS for other uses …

… on materials and approaches for which atomic layer etching has been … growth in advanced
hardware engineering and capabilities. … applications, for many pattern transfer/dry etching …

… In this work, two methods of patterning of PCM device structures was achieved … ) patterning:
the formation of a high aspect ratio pore designed for atomic layer deposition (ALD) of etch …

… Atomic Layer Deposition (ALD) is a common and proven … particularly Al 2 O 3 , for patterning
applications is examined. … CVD and ALD for High K dielectrics use similar hardware, operate …

… enables a method to create TiO 2 films with wet etch tunability. … We demonstrate lithographic
process window, pattern profile… stability of the precursor and the hardware configuration. …

… throughput atomic layer etching with ultrahigh selectivity. … the hard mask was patterned
by ion-enhanced etching from a … STM tip-based lithography hardware. The objective was to …

… by the etch of oxide and nitride materials for patterning, contact and memory applications. …
This paper describes the hardware aspects related to the control of chemistry on surfaces to …

… and results from their application investigated. Most of the … damage and/or increase etch
pattern fidelity by means of either … Ironically, it is these same hardware enhancements that …

… BSi, with a special focus on atomic layer deposition of Al 2 O 3 . … nano-patterning of other
materials to facilitate more versatile … of nanostructures with minimal hardware requirements. The …

… -enhanced atomic layer deposition (PEALD) technique. … has been its low wet etch rate.
Understanding of material … thermal stability of precursor and the hardware configuration. …