surface. Monte Carlo simulations were used to calculate the trajectories of projectiles
scattered by an angle Θ= 136°. By including Auger neutralization and charge exchange in
close collisions, energy spectra of the scattered ions as well as ion fraction values were
calculated for primary energies in the range 0.5–5 keV and compared to experimental
results. In the simulations, the Auger neutralization rate Γ and the probabilities of resonant …