Raman spectroscopy. The data are analyzed over a wide frequency range including Stokes
and anti-Stokes scattering, for different alloy compositions. Their interpretation is based on a
lineshape analysis of the spectra by using the density of vibrational states of the different
crystalline materials, and taking into account multiple-order processes. The tendency to
chemical ordering into a sp 3 connected network prevails in Si-rich films. The higher the …