Comparison of structure and tribological properties of MoS2-Ti films deposited by biased-dc and pulsed-dc
A closed field unbalanced magnetron sputter (Teer-CFUBMS/550) system was used for the
deposition of MoS2-Ti composite coatings on steel substrate (AISI D2) using biased-dc and
pulsed-dc. The tribological properties of MoS2-Ti coatings were characterized by pin-on-disc
wear tester under atmospheric conditions. Structural analysis was pointed out using X-ray
diffraction and SEM-EDS. The microstructure and chemical composition of MoS2-Ti films are
very strongly influenced by the sputtering process conditions. While X-ray diffraction pattern …
deposition of MoS2-Ti composite coatings on steel substrate (AISI D2) using biased-dc and
pulsed-dc. The tribological properties of MoS2-Ti coatings were characterized by pin-on-disc
wear tester under atmospheric conditions. Structural analysis was pointed out using X-ray
diffraction and SEM-EDS. The microstructure and chemical composition of MoS2-Ti films are
very strongly influenced by the sputtering process conditions. While X-ray diffraction pattern …
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