Quantitative understanding of reaction mechanisms in organometallic vapor phase epitaxy
(OMVPE) is critical for selection of precursors, design of equipment, and optimization of
process conditions. Progress has been made in the simulation of fluid flow as well as heat
and mass transfer, but predictions of growth rates, alloy composition, and dopant
incorporation are limited by the availability of thermodynamic and kinetic data for OMVPE
precursors. Chemical kinetic experiments are expensive and difficult to perform, and the …