Contact Metal–MoS2 Interfacial Reactions and Potential Implications on MoS2-Based Device Performance
Thin films of contact metals, specifically Au, Ir, Cr, and Sc, are deposited on exfoliated, bulk
MoS2 using electron beam deposition under two different reactor base pressures to
determine the contact metal–MoS2 interface chemistry and its dependence on the reactor
ambient. The high work function metal Au does not react with MoS2 regardless of reactor
ambient. In contrast, interfacial reactions between MoS2 and another high work function
metal, Ir, are observed when it is deposited under both high vacuum (HV,∼ 1× 10–6 mbar) …
MoS2 using electron beam deposition under two different reactor base pressures to
determine the contact metal–MoS2 interface chemistry and its dependence on the reactor
ambient. The high work function metal Au does not react with MoS2 regardless of reactor
ambient. In contrast, interfacial reactions between MoS2 and another high work function
metal, Ir, are observed when it is deposited under both high vacuum (HV,∼ 1× 10–6 mbar) …
[引用][C] Contact Metal–MoS2 Interfacial Reactions and Potential Implications on MoS2-Based Device Performance
A Rafik, MD Stephen - 2016
以上显示的是最相近的搜索结果。 查看全部搜索结果