Demonstration of electrically injected semipolar laser diodes grown on low-cost and scalable sapphire substrates

M Khoury, H Li, H Zhang, B Bonef… - … applied materials & …, 2019 - ACS Publications
M Khoury, H Li, H Zhang, B Bonef, MS Wong, F Wu, D Cohen, P De Mierry, P Vennéguès
ACS applied materials & interfaces, 2019ACS Publications
The last two decades have shown an increasing need for GaN-based laser diodes (LDs),
which are currently only grown on bulk GaN substrates, which remain to date very expensive
and/or only available in small sizes. The ever growing laser market will expand in the
coming years, thanks to the development of automotive laser lighting, high-speed Li-Fi
optical data transmission, LiDAR sensing for autonomous vehicles and smart cities, head-up
displays, and AR/VR systems, in addition to biomedical and further industrial applications …
The last two decades have shown an increasing need for GaN-based laser diodes (LDs), which are currently only grown on bulk GaN substrates, which remain to date very expensive and/or only available in small sizes. The ever growing laser market will expand in the coming years, thanks to the development of automotive laser lighting, high-speed Li-Fi optical data transmission, LiDAR sensing for autonomous vehicles and smart cities, head-up displays, and AR/VR systems, in addition to biomedical and further industrial applications. These emerging technologies demand for mass-production of GaN-based lasers to be produced on large-size, low-cost, and industrially compatible substrates. To address this issue, we demonstrate the first electrically injected semipolar 440 nm LD on high-quality and low-defect-density (11–22) GaN templates grown on scalable and low-cost sapphire substrates. The LDs exhibit a threshold current density of 17 kA/cm2, a single facet output power of more than 200 mW at 2 A with a slope efficiency of 0.85 W/A, and a TE polarization having a ratio of 97.6%. These results enable the advancement of ultra-low-cost LDs while benefiting from the inherent advantages of semipolar GaN properties.
ACS Publications
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