nanoscale, a series of molecular dynamics nanoscratch simulations are carried out on the
surfaces of c-GaN, a-GaN, and m-GaN. The key factors of scratch depth and scratch
direction that greatly influence the deformation behavior are explored by analyzing the
mechanical response, surface wear, and subsurface dislocation nucleation. The friction
coefficient, wear rate, and total length of dislocations are all found to increase with the …