Deposition of defected graphene on (001) Si substrates by thermal decomposition of acetone

TI Milenov, I Avramova, E Valcheva, GV Avdeev… - Superlattices and …, 2017 - Elsevier
We present results on the deposition and characterization of defected graphene by the
chemical vapor deposition (CVD) method. The source of carbon/carbon-containing radicals
is thermally decomposed acetone (C 2 H 6 CO) in Ar main gas flow. The deposition takes
place on (001) Si substrates at about 1150–1160° C. We established by Raman
spectroscopy the presence of single-to few-layered defected graphene deposited on two
types of interlayers that possess different surface morphology and consisted of mixed sp 2 …
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