of two injection-locked MEMS resonators, strongly coupled through their actuation voltages
by a digital mixer. For the first time the feasibility of a fully monolithically co-integrated CMOS-
MEMS differential resonant sensor, exploiting the capabilities of the injection-locked
synchronization is proved. The principle of the system is first presented, from which optimal
design guidelines are derived. The design of the different blocks of the system is then …