[PDF][PDF] Design and fabrication of piezoelectric micro power generators for autonomous microsystems
Proc. of DTIP'05, 2005•researchgate.net
This paper presents a design and fabrication of piezoelectric micro power generators
intended to be a power source for autonomous microsystems. Modelling and simulation of
such structures are presented. A power output of 60nW for AlN and 600nW for PZT, resulting
from Finite Element Method simulations is reported. Fabrication process involving deposition
of AlN layers is presented and detailed.
intended to be a power source for autonomous microsystems. Modelling and simulation of
such structures are presented. A power output of 60nW for AlN and 600nW for PZT, resulting
from Finite Element Method simulations is reported. Fabrication process involving deposition
of AlN layers is presented and detailed.
Abstract
This paper presents a design and fabrication of piezoelectric micro power generators intended to be a power source for autonomous microsystems. Modelling and simulation of such structures are presented. A power output of 60nW for AlN and 600nW for PZT, resulting from Finite Element Method simulations is reported. Fabrication process involving deposition of AlN layers is presented and detailed.
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