Development of commercial trace moisture sensor: a detailed comparative study on microstructural and impedance measurements of two phases of alumina
Porous alumina thin film has been investigated in order to find its sensitivity in the trace
moisture level. Alumina, with two different phases were obtained using sol-gel process and
fired between 400° C to 1000° C. FESEM, BET, AFM and XRD techniques were employed
for microstructural characterization of the sintered thin film in two phases. A detailed analysis
is done to assess the superiority of gamma (γ)—over alpha (α) phase using impedance
spectroscopy. It was observed that gamma phase is more sensitive towards trace level …
moisture level. Alumina, with two different phases were obtained using sol-gel process and
fired between 400° C to 1000° C. FESEM, BET, AFM and XRD techniques were employed
for microstructural characterization of the sintered thin film in two phases. A detailed analysis
is done to assess the superiority of gamma (γ)—over alpha (α) phase using impedance
spectroscopy. It was observed that gamma phase is more sensitive towards trace level …
Abstract
Porous alumina thin film has been investigated in order to find its sensitivity in the trace moisture level. Alumina, with two different phases were obtained using sol-gel process and fired between 400°C to 1000°C. FESEM, BET, AFM and XRD techniques were employed for microstructural characterization of the sintered thin film in two phases. A detailed analysis is done to assess the superiority of gamma (γ) — over alpha (α) phase using impedance spectroscopy. It was observed that gamma phase is more sensitive towards trace level moisture sensing.
Springer