Direct nanoimprinting of single crystalline gold: Experiments and dislocation dynamics simulations

J Zhang, Y Zhang, NA Mara, J Lou, L Nicola - Applied surface science, 2014 - Elsevier
Applied surface science, 2014Elsevier
This paper addresses the feasibility of direct nanoimprinting and highlights the challenges
involved in this technique. Our study focuses on experimental work supported by dislocation
dynamics simulations. A gold single crystal is imprinted by a tungsten indenter patterned
with parallel lines of various spacings. Dedicated dislocation dynamics simulations give
insight in the plastic deformation occurring into the crystal during imprinting. We find that
good pattern transfer is achieved when the lines are sufficiently spaced such that dislocation …
Abstract
This paper addresses the feasibility of direct nanoimprinting and highlights the challenges involved in this technique. Our study focuses on experimental work supported by dislocation dynamics simulations. A gold single crystal is imprinted by a tungsten indenter patterned with parallel lines of various spacings. Dedicated dislocation dynamics simulations give insight in the plastic deformation occurring into the crystal during imprinting. We find that good pattern transfer is achieved when the lines are sufficiently spaced such that dislocation activity can be effective in assisting deformation of the region underneath each line. Yet, the edges of the obtained imprints are not smooth, partly due to dislocation glide.
Elsevier
以上显示的是最相近的搜索结果。 查看全部搜索结果