Dislocation density reduction using overgrowth on hole arrays made in heteroepitaxial diamond substrates
L Mehmel, R Issaoui, O Brinza, A Tallaire… - Applied Physics …, 2021 - pubs.aip.org
The growth of large-area diamond films with low dislocation density is a landmark in the
fabrication of diamond-based power electronic devices or high-energy particle detectors.
Here, we report the development of a growth strategy based on the use of micrometric laser-
pierced hole arrays to reduce dislocation densities in heteroepitaxial chemical vapor
deposition diamond. We show that, under optimal growth conditions, this strategy leads to a
reduction in dislocation density by two orders of magnitude to reach an average value of 6× …
fabrication of diamond-based power electronic devices or high-energy particle detectors.
Here, we report the development of a growth strategy based on the use of micrometric laser-
pierced hole arrays to reduce dislocation densities in heteroepitaxial chemical vapor
deposition diamond. We show that, under optimal growth conditions, this strategy leads to a
reduction in dislocation density by two orders of magnitude to reach an average value of 6× …
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